Estimation of Young's Modulus for Polysilicon Thin Film by Finite Element Analysis
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Society of Materials Science, Japan
سال: 2005
ISSN: 0514-5163,1880-7488
DOI: 10.2472/jsms.54.1016